ASML Holding (ASML) reported Q4 earnings Wednesday of 6.84 euros ($7.12) per diluted share, up from 5.20 euros a year earlier.
Analysts polled by FactSet expected 6.72 euros.
Net sales for the quarter ended Dec. 31 were 9.26 billion euros, up from 7.24 billion euros a year earlier.
Analysts surveyed by FactSet expected 9.06 billion euros.
The company's shares gained about 9% in premarket activity.
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