【三星电子NRD-K半导体研发综合体进机 将导入ASML High NA EUV光刻设备】金十数据11月20日讯,三星电子举行了位于器兴园区的NRD-K新半导体研发综合体的进机仪式。NRD-K半导体研发综合体将成为三星电子DS部下属三大事业部(存储器、系统LSI和Foundry)的共同核心研发基地,到2030年这一项目将累计获得约20万亿韩元的投资。NRD-K还将包含一条研发专用线,该产线将于2025年中投入使用。NRD-K综合体将导入ASML High NA EUV光刻机、新材料沉积设备在内的一系列最先进半导体生产工具,旨在加速3D DRAM、千层V-NAND在内的下代存储芯片开发。
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