快科技12月3日消息,光刻设备制造商ASML近日在其官网纪念品商城推出了一款特别的产品——High NA EUV光刻系统TWINSCAN EXE:5000的乐高模型套装。
该模型的定价为227.95美元,约合人民币1653元。
这款乐高模型由ASML的员工兼乐高爱好者Rick Lenssen设计,包含851个零件,尺寸为宽352mm、高99mm、深64mm,精确复刻了TWINSCAN EXE:5000的外观。
High NA EUV光刻机是全球首款采用0.55NA数值孔径的光刻机,分辨率达到8nm,成像对比度比之前的NXE系列0.33NA EUV系统高出40%,支持2nm逻辑节点图案化,单价高达3.5亿欧元。
Rick Lenssen此前曾花费2.5年时间(1.5年设计蓝图、1年实际组装)用乐高积木复现了ASML的费尔德霍芬主园区,并推出过多款ASML主题的乐高套装产品。
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