金融界2025年1月25日消息，国家知识产权局信息显示，细美事有限公司申请一项名为“基板处理系统及工艺气体供应控制验证方法”的专利，公开号 CN 119340237 A，申请日期为2023年12月。
专利摘要显示，本发明作为基板处理系统以及工艺气体供应控制验证方法，更详细地，公开一种验证将用于执行半导体工艺的工艺气体根据配方(Reicpe)调节为适当流量并供应的质量流量控制器(MFC)的工作的技术。工艺气体供应控制验证方法包括：验证气体供应步骤，用质量流量控制器调节验证气体的供应流量并供应工艺气体，同时通过旁通气体供应线向标定罐供应工艺气体；验证区间选定步骤，通过供应工艺气体而使所述标定罐的状态变化，同时选定验证时间区间；变化状态测定步骤，在所述验证时间区间中测定所述标定罐的变化状态以及供应流量算出步骤基于所述标定罐的变化状态测定值来算出对工艺气体的供应流量。
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