【富加镓业4英寸VB法氧化镓衬底性能达到国际先进水平】金十数据2月20日讯，记者从杭州光学精密机械研究所获悉，杭州光机所孵育企业杭州富加镓业在垂直布里奇曼（VB）法氧化镓晶体生长领域取得重大突破，经测试单晶质量达到国际先进水平，现同步向市场推出晶体生长设备及工艺包。测试结果表明，使用富加镓业设备生长出的4英寸VB晶体内无孪晶，单晶衬底XRD半高全宽（FWHM）优于50arcsec，与导模法制备的氧化镓单晶衬底质量相当，性能达到国际先进水平。
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