2025SEMICON CHINA :东方晶源新品DR-SEM r655备受瞩目

ZOL中关村在线
27 Mar

东方晶源多年来深耕电子束检测领域,其电子束缺陷检测设备EBI与关键尺寸量测设备CD-SEM先后实现国产替代零的突破,并获市场认可。2023年初,东方晶源推出DR-SEM r600,搭配3通道电子成像技术与新型设备平台,在客户端完成量产验证,为后续开发奠定了基础。经过两年时间迭代研发,东方晶源最新一代DR-SEM r655产品将搭载全新的高性能电子枪和光学检测模组,以及升级版传片系统和算法系统,突破...

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