比亚迪申请器件制备方法、设备及应用专利,有效改善多层外延层电阻率分布不均匀缺陷

金融界
21 Apr

金融界 2025 年 4 月 21 日消息,国家知识产权局信息显示,比亚迪股份有限公司申请一项名为“器件制备方法、设备及应用”的专利,公开号 CN119843358A,申请日期为 2024 年 11 月。专利摘要显示,本申请提供一种器件制备方法、设备及应用,涉及半导体材料制备技术。其中,器件包括衬底和至少一个外延层;该方法包括:在对反应器内的衬底或第 x 层外延层进行外延淀积之前,向反应器内通入...

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