Axcelis Technologies (ACLS) reported Q4 earnings late Monday of $1.54 per diluted share, down from $2.15 a year earlier.
Analysts polled by FactSet expected $1.25.
Revenue for the quarter that ended Dec. 31 was $252.4 million, down from $310.3 million a year earlier.
Analysts surveyed by FactSet expected $245 million.
The company said it expects Q1 earnings of $0.38 per diluted share on revenue of about $185 million. Analysts polled by FactSet expect $1 and $221.6 million, respectively.
Shares of Axcelis Technologies were down 7.6% in after-hours activity.
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